Zygo APM650 Optical Profiler Inspects Semiconductor Boards

Monday, August 24, 2015

Contact: Eric Felkel (860) 704-5173, efelkel@zygo.com


MIDDLEFIED, CT – Zygo Corporation, a unit of AMETEK Ultra Precision Technologies, has introduced the APM650™ large platform profiler for production metrology of advanced printed circuit board (PCB) packaging applications.

The new APM650 system employs ZYGO’s industry-leading Coherence Scanning Interferometry (CSI) measurement technology that enables manufacturers to quantify critical feature parameters on PCB panels up to 650 x 650mm. Typical applications for the APM650 profiler include depth, size, and critical dimension metrology of via holes, solder resist openings, traces, trenches and bumps.

“Manufacturers are pressed to both reduce cycle times and increase yield, and, to do so, they need to control a wide range of surface structure parameters. The APM650’s unique platform is sized to enable full characterization of even the largest production PCB panels,” notes Eric Felkel, Optical Profiler Product Manager, Zygo Corporation.

“With its large platform, production-ready Mx™ software, and optimized optical system, the APM650 profiler is able to achieve the specialized requirements of PCB makers. Whether they have high aspect-ratio features, or low reflectivity ceramic substrates, this system meets the need.”

Non-Contact Optical Technology
The APM650 profiler builds on the strengths of ZYGO’s NewView™ and Nexview™ family of profilers. It has the ability to measure a wide range of surfaces from rough to super smooth, including thin films, steep slopes, high aspect ratios and large steps.
The system’s non-contact measurement technique enables sub-nanometer vertical and sub-micron lateral precision that allows for the non-destructive, direct characterization of surface roughness, structure and texture on PCB board structures

Performance and Reliability Delivered Efficiently
The gage-capable APM650 system provides exceptional precision and repeatability in a metrology system for PCB applications. The system is equipped with ZYGO’s proprietary SureScan™ vibration tolerant technology that ensures robust operation in virtually any operating environment and enhances its performance in manufacturing facilities.

Broad Flexibility in Configuration
With configurable application recipes, automated hardware, and a custom scripting capability, the versatile APM650 allows manufacturers to tailor the measurement process and combine multiple metrology steps on a single station. The platform has broad flexibility that permits its configuration according to the specific user requirements that include customized panel fixtures and transparent films analysis capabilities.

An extensive range of Zygo parfocal objectives can be used with APM650 profilers from 1.4x to 100x, along with a wide selection of application specific objectives that include glass compensated lenses for measuring through a transmissive packaging window as well as both long and super-long working distance objectives for measurement of deeply recessed surfaces inaccessible using a standard working distance objective.

Zygo Corporation, a unit of AMETEK Ultra Precision Technologies Division, is a leading provider of optical metrology solutions, high-precision optics, and optical assemblies used in a wide range of scientific, industrial, and medical applications.

AMETEK, Inc. is a leading global manufacturer of electronic instruments and electromechanical devices with 2014 annual sales of $4.0 billion. For more information, contact Zygo, 21 Laurel Brook Rd., Middlefield, CT 06455-1291 USA. Telephone: +1-860-347-8506. E-mail: inquire@zygo.com

Click here for a hi-es image of the Zygo APM650 Optical Profiler from Zygo